Electronic gas is widely used in high-tech industries such as semiconductor, microelectronics, solar energy and flat panel display, mainly for thin film deposition, etching, doping, passivation, cleaning or use as a carrier gas, protective atmosphere and so on. The characteristics of electronic gas include:
· High purity and quality.
· Impurity requirements are strictly controlled.
· High packaging and valve requirements.
· Strict requirements for document support and production records.
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